SEM provides detailed high resolution images of the sample by rastering a focussed electron beam across the surface and detecting secondary or backscattered electron signal. An Energy Dispersive X-Ray Analyzer (EDX or EDA) is also used to provide elemental identification and quantitative compositional information .
What is the purpose of SEM EDX?
SEM provides detailed high resolution images of the sample by rastering a focussed electron beam across the surface and detecting secondary or backscattered electron signal. An Energy Dispersive X-Ray Analyzer (EDX or EDA) is also used to provide elemental identification and quantitative compositional information .